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by microsystems

Nano-technology beyond its limits

MicroSystems offers plasma and ion beam technology for ultra precise surface engineering. We are your professional partner with our customer specific tools for high volume production, research and development

High-end solutions for high-tech industries.


14.03.2017 - 16.03.2017


29.04.2017 - 04.05.2017




SPIE Defense + Commercial Sensing Expo - Wrap-Up MORE

MicroSystems offers the full value chain of consulting, process development, mechanical design, construction and assembling, software development and implementation as well as installation and after-sales service for Ion Beam and Plasma process systems for deposition end etching. MORE

More than 20 years experience and a solid competence in systems for Ion Beam Etching (IBE / RIBE / CAIBE), Ion Beam Milling and Trimming (IBM / IBT), Ion Beam Sputter Deposition (IBSD) Reactive Ion Etching (RIE), Plasma Enhanced Chemical Vapor Deposition (PECVD) as well as PVD, ALD and other processes. MORE

MicroSystems Tools are used in the fields of semiconductor (Hard Disc Drives, SAW/BAW/RF-MEMS), optics for high precision applications (Large Mirror Telescopes, Aspherical Lenses, Stepper Optics for EUV Lithography, Laser applications), sensor technology, photovoltaics and Research and Development. MORE